Commercial quality high-performance true zero-order quarter waveplates based on artificial dielectric nanostructures were made by high throughput and low cost warer-based nanofabrication processes. Both precise phase retardation (90 degrees +/- 2 degrees across a 100 mm-in-diameter glass wafer) and a high transmittance (> 98.8%) were achieved. The quarter waveplates with different center wavelengths, such as, 780 nm and 660 nm, have been fabricated for optical pick-up (CD/DVD) applications. The nanostructure based true zero-order quarter waveplates are operational at a large wavelength and temperature range under a wide incident angle, The developed high quality true zero-order quarter waveplates have the potential for many cost-sensitive optical applications. Furthermore, it opens the potential for integrated optical applicafions thanks to the nanorabrication processes. (c) 2005 American Vacuum Society.