Tip [in this article, tip refers to the apex region of an atomic force microscopy (AFM) probe, A probe consists of substrate, cantilever, and tip.] wear is a phenomenon that can reduce the accuracy and reliability of AFM. As both tip size and specimen approach nanometer scale, tip shape change due to wear becomes critical to topographical measurements such Lis critical dimensions and deep trenches. This article presents probe designs with specific wear-resistant features. Three categories of probe modification were selected to lessen wear, thereby improving lifetime and performance. These are probe material, surface coatings, and selective shape. (c) 2005 American Vacuum Society.