In order to investigate the B and Ge interaction in silicon, an implant/anneal experiment is performed. The initial Si pre-amorphization step defines the amorphous layer depth and the end-of-range point defect distributions for all samples. The following Ge implant provides a low Ge content, thus minimizing the strain and the band gap narrowing effects on the diffusion of the subsequent B implant. The control sample received Si and B implants. The annealed profiles of the control samples show B profile broadening consistent with the transient enhanced diffusion. The B tail diffusion in the Ge implanted samples is almost identical to that of the control samples, indicating that Ge does not act as a trap for the BI pair. The GeB complex, suggested in literature, was used to explain the higher profile peak magnitude in Ge implanted samples. (c) 2006 American Vacuum Society.