Thin films of CeO2 were deposited by spray-pyrolysis on P-quartz or optical grade silica glass substrates heated at 350-500 degrees C. Ethylene glycol solutions of Ce(NO3)(3) and cerium citrates or tartrates (prepared using Ce(NO3)(3) or CeCl3 as cerium sources) were used as starting materials. Crystalline films may be obtained "in situ". Post deposition annealing at 800 degrees C leads to bigger crystallites and cell constant closer to that of a reference material. The influence of the deposition temperature and the nature of the cerium compounds on the crystal structure and morphology of the films were studied. (c) 2005 Elsevier B.V. All rights reserved.