Thin Solid Films, Vol.501, No.1-2, 61-64, 2006
Development of catalytic chemical vapor deposition apparatus for large size substrates
A Cat-CVD (catalytic chemical vapor deposition, Hot-Wire CVD) apparatus for deposition of large area substrates is developed. Technical issues for a large area deposition apparatus are pointed out and the way to solve such issues is demonstrated, along with deposition performance. It is shown that a large area deposition apparatus as a prototype of future mass-production machine is realized by using the Cat-CVD technology. (c) 2005 Elsevier B.V. All rights reserved.