Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon Microelectronics: Processing to Packaging Singapore, July 3-8, 2005 - Preface

Mhaisalkar SG; Yeo YC; Balasubramanian N; Lu TM; Zschech E

Thin Solid Films, Vol.504, No.1-2, 1-1, 2006

DOI10.1016/j.tsf.2005.09.148 Export Citation

Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon Microelectronics: Processing to Packaging Singapore, July 3-8, 2005 - Preface

Mhaisalkar SG, Yeo YC, Balasubramanian N, Lu TM, Zschech E