A fabrication process of the microfabrication of ceramic materials is an inevitable demand for the devices in the fields of microreactor and MEMS applicable to harsh environments requiring a tolerance to high temperatures, a resistence to corrosion, as well as tribological properties. The study describes the microfabrication of SiC-based ceramic microstructures and the preparation of microfluidic channels using soft lithographic techniques from preceramic polymers. It is believed thath the fabrication of SiC-based microstructures and microfluidic channelshold tremendous potential in the field of microreaction technology and micro total analysis systems.