Hydrogen permselective multi-membrane modules were prepared by simultaneously depositing silica using a counter-diffusion chemical vapor deposition (CVD) procedure. Mesoporous gamma-alumina layer prepared over alpha-alumina substrates were arranged inside a tubular casing and attached to the casing at either ends using glass sealing. Tetramethylorthosilicate and oxygen were allowed through either sides of the gamma-alumina layer at 873 K, which produced a deposit inside this layer thereby reducing the pore diameter. This module displayed an activated transport for hydrogen molecules while effectively filtered larger molecules like N-2, CH4 and CO2. Hydrogen permeation values increased from 1.57 x 10(-10) mol m(-2) s(-1) Pa-1 at 373 K to 4.38 x 10(-8) mol m(-2) s(-1) Pa-1 at 873 K, with activation energy (E-a) of 22.92 kJ mol(-1). The permeation values for N-2, CH4 and CO2 molecules remained below 10(-11) mol m(-2) s(-1) Pa-1, yielding a selectivity ratio with H-2 of > 2000, which indicates the superior quality of this module. The permeance values were also comparable with that obtained for single membranes prepared using a similar method. Hydrothermal stability of this module, when analyzed under membrane reactor conditions (H2O/N-2 = 3; 76 kPa), was found to be stable for more than 15 h.