Nanometer-sized Pt-dendrite structures were fabricated on an insulator Al2O3 substrate using an electron-beam-induced deposition (EBID) process in a transmission electron microscope (TEM). The as-fabricated structures were characterized using conventional and high-resolution transmission electron microscopies (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The as-fabricated nanodendrites consisted of many nano-grains and amorphous state structures. The nanometer-sized grains were determined to be Pt crystals with face-centered cubic (fcc) structure. The formation of the nanodendrite structures are discussed to relate to a mechanism involving charge-up produced on surface of the substrate, movement of charges to and accumulation at the convex surface of the substrate and the tips of the deposits. (c) 2006 Springer Science + Business Media, Inc.