Journal of Vacuum Science & Technology B, Vol.24, No.2, 979-982, 2006
Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment
Carbon nanotubes (CNTs) have been investigated as an emitter for field emission display (FED). In our FED fabrication process, the printed CNTs are raised by a laser irradiation for the purpose to improve the emission characteristics. Because the emitters have to be controlled in each pixel individually on FED, the uniformity of the emission characteristics is necessary. We could improve the emission characteristics uniformity successfully by two methods. In the first method, the distribution of CNT raisings was homogenized by the modification of the irradiation pattern that consisted of an array of small areas. The emission deviation was improved to approximately half by the method. In the second method, the impurities of CNT raisings were cleaned by post-laser-irradiation of which fluence was lower than that of first irradiation. The emission characteristics improved and the turn-on electric field reduced from 2.1 to 1.4 V/mu m. The emission deviation also improved to approximately half. (c) 2006 American Vacuum Society.