The formation and characterization of close-packed monolayers of negative, poly( N-isopropylacrylamide)-based microgel particles onto positively charged silicon wafers is described. The silicon wafers were rendered positive by first oxidizing their surface to silica and then adsorbing a layer of poly( ethyleneimine). The thickness of the deposited microgel monolayers ( under aqueous conditions) has been determined by spectroscopic ellipsometry as a function of temperature ( 20-60 degrees C), pH ( 3-8), and added NaCl concentration ( 0-1 M). No actual desorption of the microgel particles was evident on changing the conditions, but a swelling/deswelling transition was observed around 32 degrees C. The thickness of the monolayer has been compared with the hydrodynamic diameter of the free microgel particles, dispersed in aqueous solution. For the poly( N-isopropylacrylamide) microgel particles, without any bulk ionisable comonomer groups present, the temperature dependence of the ellipsometric thickness of the monolayer mirrors closely that of the hydrodynamic diameter of the free particles. When ionizable (-COOH) groups are introduced into the microgel particles, however, this correspondence is largely lost because the microgel particles forming the deposited monolayer now contract strongly onto the oppositely charged substrate surface.