VHF excited plasma is produced with a ladder-shaped electrode and the plasma parameters are measured with a heated Langmuir probe. When the discharge frequency (similar to 100 MHz) of the RF power source is increased, the plasma density increases while the electron temperature decreases. Plasma uniformity less than 15% over 1.2 m x 1.5 m is realized by employing the phase modulation method, that is, the pattern of the standing wave on the electrode can be controlled by changing the phase of the RF power. (c) 2005 Elsevier B.V. All rights reserved.