High-aspect-ratio ZnO nanowires and nanotubes are formed on indium tin oxide (ITO) substrates using a three-step route at low temperatures. The three steps, including successive ionic layer absorption and reaction (SILAR) deposition of the ZnO seed layer, hydrothermal annealing of the seed layer, and chemical bath deposition (CBD) of the one-dimensional (1D) ZnO nanostructures, are all conducted in aqueous solutions at temperatures below 120 degrees C. Both the hydrothermal annealing of the SILAR seed layer and the low-concentration precursor solution employed in the CBD process are crucial in order to synthesize the uniform and high-aspect-ratio ZnO nanostructures on the ITO substrate. TEM analyses reveal that both the nanowire and the nanotube possess the single-crystal structure and are grown along [001] direction. Room-temperature cathodoluminescence spectrum of the 1D ZnO nanostructures shows a sharp ultraviolet emission at 375 nm and a broad green-band emission.