The paper presents the synthesis process of dense and nanoporous TiO2 anatase films obtained via Spray Pyrolysis Deposition (SPD). The deposition of dense and narrostructured TiO2 films uses ethanol solutions of titaniumtetraisopropoxid and acetilacetonate. The influence of the precursor's concentration and deposition parameters (temperature, pressure of the carrier gas and distance of spraying) in tailoring the TiO2 morphology is presented. The films are tested via X-ray Diffraction and Scanning Electron Microscopy. The photoelectrical properties are tested by current-voltage (I-V) experiments in dark, at room temperature. According to the results, SPD proves to be a reliable technique in obtaining thin layers of TiO2 with controlled morphology. (c) 2005 Elsevier B.V. All rights reserved.