The effect of oxygen plasma treatment on the surface properties of tin-doped indium oxide (ITO) substrates and the changes in surface properties of treated ITO substrates with ageing time were investigated by X-ray photoelectron spectroscopy (XPS), contact angle and surface free energy measurements. Experimental results show that oxygen plasma treatment increases the oxygen concentration, decreases the carbon concentration, and enhances the surface free energy and polarity, and thereby improves the surface properties of ITO substrates. However, the improved ITO surface properties tended to decay and the surface free energy decreased, with ageing time. In addition, the ageing effect of treated ITO substrates on the performance of polymer light-emitting diodes (LEDs) was studied with respect to the driving voltage, electroluminescent luminance and efficiency. We observe that the ITO substrates aged for various times result in significant differences in optical and electrical characteristics which become worse as the ageing time increases. The optical and electrical performance of polymer LEDs is closely related to the surface properties of ITO substrate and the interface characteristics of ITO/polymer. (c) 2006 Elsevier Inc. All rights reserved.