화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.24, No.4, 1518-1523, 2006
Thermochromic La1-xSrxMnO3 (x=0.1, 0.175, and 0.3) smart coatings grown by reactive pulsed laser deposition
Thermochromic La1-xSrMnO3 (x=0.1, 0.175, and 0.3) (LSMO) smart coatings were synthesized on (100) silicon and (0001) sapphire substrates by means of reactive pulsed laser deposition process at relatively low substrate temperature (500 degrees C) and without postannealing. X-ray diffraction patterns indicated that all deposited LSMO films have polycrystalline structures. The energy dispersive x-ray spectroscopy analysis indicated approximately the same La/Sr ratio in the formed LSMO coatings as in their corresponding targets. While, the x-ray photoelectron spectroscopy analysis of the LSMO/sapphire revealed that the strontium segregate at the film surface. The thermochromism of LSMO coatings was investigated by measuring their infrared reflectance as a function of temperature (up to 160 degrees C). It was observed that the reflectance decreased as the temperature increased. Reflectance switching of about 25% was achieved in La0.7Sr0.3MnO3/Si at a wavelength of 5 mu m. The sheet electrical resistivity as a function of temperature (up to 130 degrees C) of LSMO/ sapphire was investigated by means of the standard four-point probe technique. The resistivity decreased with increasing the temperature and no metallic-to-insulator transition was observed. However, it is found that the resistivity is very sensitive to the concentration level of Sr dopant: the resistivity decreased as the concentration of Sr increased. In addition, at room temperature, a higher temperature coefficient of resistance of -2.30%/degrees C was achieved in La0.9Sr0.1MnO3 thin films. Finally, these LSMO smart coatings are promising materials for optical switching and IR uncooled bolometer devices. (c) 2006 American Vacuum Society.