화학공학소재연구정보센터
Thin Solid Films, Vol.513, No.1-2, 385-390, 2006
Thermal conductivity of sintered porous silicon films
We measure the thermal diffusivity, thermal conductivity, and the volumetric heat capacity of sintered porous silicon at room temperature using a non-contact method based on lock-in thermography. Free standing single-crystal thin film samples with porosities between 27% and 66% are analyzed. The observed thermal conductivities range from 2 1 to 2.3 W/(m K) and decrease with increasing porosity. Effective medium theory calculations describe the dependence of the thermophysical properties oil the sample porosity. (c) 2006 Elsevier B.V. All rights reserved.