Reagentless micropatterning of hydrogen-terminated Si(111) via UV irradiation through a photomask has proven to be a convenient strategy for the preparation of ordered bicomponent monolayers. The success of this technique relies upon the differential rate of reaction of an alkene with the hydrogen- terminated and photooxidized regions of the surface. Monolayer formation can be accomplished under either thermal or photochemical conditions. It was observed that, after 3 h, reaction in neat alkene solution irradiation (Rayonet, 300 nm) afforded the expected patterned surface, while thermal conditions (150 degrees C) resulted in a partial loss of pattern fidelity. Monolayer properties and formation were studied on oxidized and hydrogen- terminated silicon under thermal and photochemical initiation, by contact angle, ellipsometry, Fourier transform infrared spectroscopy, high-resolution electron energy loss spectroscopy, and X-ray photoelectron spectroscopy. Results show that alkenes add to silanol groups on the silica surface in a manner consistent with acid catalysis: once attached to the surface, the silica oxidized the hydrocarbon.