Cubic and tetragonal Y2O3-doped ZrO2 thin films were deposited with a dense surface morphology by electrostatic spray deposition. Four dependent process parameters - substrate temperature, precursor solution flow rate, nozzle to substrate distance and the deposition time - have been used to control the process. Temperature dependent Raman spectroscopy and X-ray diffraction were performed in order to investigate the crystallization behavior and structural properties. (c) 2006 Elsevier B.V. All rights reserved.