We present a new and simple method to produce superhydrophobic surfaces with ultralow hysteresis. The method involves surface modification of SU-8 using an excimer laser treatment. The modified surface is coated with a hydrophobic plasma-polymerized hexafluoropropene layer. The advancing and receding water contact angles were measured to be approximately 165 degrees. The achieved water contact angle hysteresis was below the measurement limit. This low hysteresis can be ascribed to nanoscale debris generated during the excimer laser process.