Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.24, No.6, 2769-2771, 2006 DOI10.1116/1.2366608 Export Citation Fabrication of nanoelectromechanical resonators using a cryogenic etching technique Nelson-Fitzpatrick N, Westra K, Li P, McColman S, Wilding N, Evoy S Please enable JavaScript to view the comments powered by Disqus.
