Amorphous lithium lanthanum titanate (LLTO) solid electrolyte thin-films have been fabricated by e-beam evaporation. The effect of different e-beam power on the physical properties and electrical performance of LLTO thin-film is investigated. Higher e-beam power is a key factor to obtain good quality LLTO thin-film which has higher ionic conductivity. X-ray diffraction patterns, X-ray photoelectron spectra, scanning electron microscopy and impedance spectroscopy are used to characterize their physical and electrical properties. An all-solid-state of Li/LiPON/LLTO/LiCoO2 cell using LLTO thin-film as solid electrolyte exhibits the first discharge capacity of about 50 mu A h/cm(2)-mu m and the capacity fading is about 0.5% per cycles after 100 discharge-charge cycles at discharge current of 7 mu A/cm(2), demonstrating the promise of e-beam. evaporation deposition for the fabrication of LLTO thin-film for all-solid-state thin-film rechargeable lithium batteries. (c) 2006 Elsevier B.V. All rights reserved.