The field emission characteristics of an oxidized porous polysilicon (OPPS) were investigated with a Pt/Ti multilayer electrode, which showed highly efficient and stable electron emission characteristics compared with those of conventional Au/NiCr electrodes. The thin Ti layer played an important role in promoting the adhesion of Pt to SiO2 surface and the distribution of the electric field on the OPPS surface. Additionally, the Ti layer efficiently blocked the diffusion of emitter metal, which resulted in more reliable emission characteristics.