Surface attachment of the enzyme horseradish peroxidase (HRP) was studied on untreated and ion beam implanted polystyrene (PS) films. The PS films of 100 nm thickness on a silicon wafer were treated using the plasma immersion ion implantation (PIII) technique, with argon ions of energy 20 keV and fluences of up to 2 x 10(16) ions/cm(2). Differential transmittance Fourier transform infrared (FTIR) spectra confirmed the presence of proteins on the PS surfaces by detection of the amide A, I, and II protein vibrations. Spectroscopic ellipsometry over the UV-vis spectral region provided the optical constants and thickness of the protein layer, while tapping mode atomic force microscopy (AFM) was used to image the protein distribution on the surface. The combination of AFM, ellipsometry, and FTIR analysis showed that, on the untreated PS surface, HRP formed islands 8 nm in height and 30 nm in lateral size, covering approximately 27% of the PS surface. After PIII modification of the PS surface, the protein covered 100% of the surface area.