화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.154, No.4, H263-H267, 2007
High performance 1.55 mu m InGaAsP buried-heterostructure laser diodes fabricated by single-step MOCVD regrowth and self-aligned technique
In this article, we demonstrate a simple and low-cost method to fabricate the 1.55 mu m strained multiquantum-well InGaAsP/InP buried-heterostructure (BH) laser diodes (LDs) by using the single-step metallorganic-chemical-vapor-deposition (MOCVD) regrowth and self-aligned technique. The active region is buried by the intrinsic InP layer which is used as the current-blocking layer as well as the electrical and optical confinement layer. The BH LDs have a calculated internal quantum efficiency of 81% and an internal loss of 21.5 cm(-1). The fabricated as-cleaved BH LDs exhibit a threshold current of 6.5 mA, a maximum light output power of 21 mW at 100 mA, a maximum operating temperature of 100 degrees C, and a characteristic temperature of 72 K in 20-60 degrees C. The BH LDs with an as-cleaved front facet and a high reflectivity coating (similar to 92%) applied to the rear facet can increase the maximum operation temperature up to 125 degrees C and have a light output power exceeding 10 mW at 80 mA and 100 degrees C. The 3 dB frequency at a bias current of 40 mA is 8.0, 6.5, and 5.2 GHz at 30, 60, and 90 degrees C, respectively. Besides, the 3 dB modulation bandwidth can be extended as far as 10.5 GHz at 20 degrees C and 60 mA. These results confirm that BH LDs have the potential capacity for high-speed fiber optic applications. (c) 2007 The Electrochemical Society.