화학공학소재연구정보센터
Thin Solid Films, Vol.515, No.9, 4182-4186, 2007
Handling of fine-particles by time-averaged particle driving method in plasmas
We developed a noble technique for the fine-particle handling in plasmas. In this method a pair of point electrodes are introduced in the plasma, to which positive pulses are applied alternatively. When the pulse repetition period is shorter than the particle response time, the particles feel only time-averaged force because of their large mass. Spatial profile of the equivalent potential of the time-averaged force varies from a circle to an ellipse with an increase in the local discharge at the electrodes. The particles are eventually transported toward a middle point between two pointelectrodes, being almost independent of their initial positions. This method is quite effective for converging fine particles in the plasma. (c) 2006 Elsevier B.V. All rights reserved.