Amorphous Li2O-B2O3-P2O5 thin films were prepared from an aqueous precursor solution of a LiNO3 and BCl3, POCl3 by Aerosol Flame Deposition. The aqueous precursor solution of the LiNO3 was first atomized with an ultrasonic vibrator (1.7 MHz), and B2O3 and P2O5 were synthesized from BCl3 and POCl3 by an oxygen-hydrogen flame. Their microstructure and electrical properties were investigated by SEM, XRD, Raman spectroscopy and impedance spectroscopy. XRD analysis revealed that a crystalline phase of LiCl was formed in the glass soot as well as amorphous boron and phosphorus oxides, and the crystalline LiCl found in deposited glass soot completely disappeared by heat treatment. The correlation between the structural modification of glass network, compositional variation and the conductivity was characterized by Raman spectroscopy. The glass electrolyte fabricated in this study exhibited a maximum conductivity of about 10(-7) S/cm at 30 sccm flow rate of BCl3 and POCl3. (c) 2006 Elsevier B.V. All rights reserved.