A few millimeter size plasma was generated in a pin to plane electrode configuration with either Aluminum or Indium Tin Oxide glass. Depending on the plane electrode material, the plasma showed either corona or corona-dielectric barrier discharge hybrid discharge characteristics. From electrical and optical diagnostics, it was found that the hybrid discharge was more electrically stable and had lower rotational temperature. A feasibility study of material surface modification was performed with the hybrid discharge. All samples such as polyethylene and polypropylene films became more hydrophilic, and the surface property was changed only within the radius of less than about 12 mm. In addition, several effects of gas temperature and treatment time on the surface modification were studied besides the durability. (c) 2006 Elsevier B.V All rights reserved.