The electrochemical formation of nanotubular titanium oxide films was investigated in 1 M H2SO4 and 0.05-0.4 wt.% HF electrolytes. Depending on anodization condition, i.e. cell voltage, anodization time, HF concentration, TiO2 porous films having different thickness (from 350 to 500 nm) and pore diameter (from 40 to 150 nm) were obtained. By varying the cell voltage from 10 V to 40 V it was possible to gradually change the crystal structure of titanium oxide from anatase to rutile. The effect of annealing temperature and duration on crystal structure was also considered. (c) 2006 Elsevier B.V. All tights reserved.