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Thin Solid Films, Vol.515, No.13, 5524-5527, 2007
Effect of heating on the behaviors of hydrogen in C-TiC films with auger electron spectroscopy and secondary ion mass spectroscopy analyses
C-TiC films with a content of 75% TiC were prepared with magnetron sputtering deposition followed by Ar+ ion bombardment. Effect of heating on the behaviors of hydrogen in C-TiC films before and after heating was studied with Auger Electron Spectroscopy and Secondary Ion Mass Spectroscopy (SIMS) analyses. SIMS depth profiles of hydrogen after H+ ion implantation and thermal treatment show different hydrogen concentrations in C-TiC coatings and stainless steel. SIMS measurements show the existence of TiH, TiH2, CH3, CH4, C2H2 bonds in the films after H+ ion irradiation and the changes in the Ti LMM, Ti LMV and C KLL Auger line shape reveal that they have a good hydrogen retention ability after heating up to the temperature 393 K. All the results show that C-TiC coatings can be used as a hydrogen retainer or hydrogen permeable barrier on stainless steel to protect it from hydrogen brittleness. (C) 2007 Elsevier B.V. All rights reserved.
Keywords:Auger electron spectroscopy;secondary ion mass spectrometry;titanium carbide;hydrogen retention;heat treatment