Thin Solid Films, Vol.515, No.14, 5611-5614, 2007
Layer-by-layer growth of thin epitaxial Fe3Si films on GaAs(001)
Molecular beam epitaxy of Fe3Si films on GaAs (001) is studied in situ by grazing incidence X-ray diffraction. Fe3Si grows layer-by-layer. During deposition the growth front roughens as indicated by the damping of the X-ray oscillations and corresponding atomic force micrographs. The X-ray oscillations are modified during growth at substrate temperatures of 180 degrees C and below. (c) 2006 Elsevier B.V. All rights reserved.