화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.25, No.3, 437-440, 2007
Infrared absorber for pyroelectric detectors
A quarter-wavelength absorber structure was developed for pyroelectric detector applications in the 2.5-3.5 mu m range. The absorber consisting of Pt and plasma-enhanced chemical vapor deposited SiO2 layers was fabricated using standard clean-room processes. It exhibited a minimum reflectance of 2%. (C) 2007 American Vacuum Society.