Rapid thermal MOCVD technique was adopted and applied for growing epitaxial films of BaTiO3 on MgO substrates. A detailed description of modified experimental set-up design is given. Major modifications are towards optimizing the sources and gas lines. A new barium metalorganic precursor was developed on the basis of mixed ligand complexes of barium beta-diketonates. Testing procedures showed that the developed precursor offers the advantages of low melting temperature, good volatility and case of synthesis and handling. Grown layers were characterized by low and high resolution X-ray diffraction, scanning electron microscopy (SEM), and energy dispersive spectrometry in SEM in order to obtain information on structural quality, surface morphology and composition. (C) 2006 Elsevier B.V. All rights reserved.