The paper analyses, at nanoscale levels, the chemical composition and mechanical properties of the anodic oxide films formed on Ti-6Al-4V alloy by galvanostatic polarization at maximum final voltages of 12-100 V. For the investigations Auger Electron Spectroscopy, Photoelectron Spectroscopy and nanoindentation measurements have been used. The results have shown that anodizing the Ti-6Al-4V alloy produces an oxide film whose thickness depends on the final voltage. The chemical composition is not significantly dependent on the thickness, the film consists of TiO2 and Al2O3. However, the best insulating properties of the films, determined from the growth parameter nm/V, are achieved with a final voltage between 30 and 65 V. Nanohardness and Young's modulus measurements have shown that the anodic films formed by different voltages exhibit similar mechanical properties which is consistent with the results of the surface analysis. (C) 2006 Elsevier B.V. All rights reserved.