Thin Solid Films, Vol.515, No.16, 6582-6585, 2007
Optical emission studies of the gas phase during the silicon suboxide deposition by reactive r.f. magnetron-sputtering
Silicon oxide (a-SiO) is one of the most used silicon-based materials in optoelectronic and microelectronic technology. it is well-known that the electronic properties are linked to the material structure, which depends on the deposition technique and on the details of the deposition. Silicon suboxide (a-SiOx 0