화학공학소재연구정보센터
Thin Solid Films, Vol.515, No.17, 6676-6681, 2007
Magnetic and semi-conducting nano-composite films of spinel ferrite and cubic zinc oxide
Magnetic and semi-conducting nano-composite films have been prepared under bias polarization, by radio-frequency sputtering of a pure zinc ferrite target. These composite thin films are made of cubic Zn1-yFeyO monoxide islands inside a spinet ferrite matrix. The relative proportion of each phase depends on the substrate polarization (i.e. bias power). When no bias is applied the films solely display the diffraction pattern. of a spinet phase even if some islands inside the film can be observed by electron microscopy. When the bias power is increased, the spinet phase disappears progressively as enhanced fori-nation of islands takes place in such a manner that the cubic Zn1-yFeyO monoxide is solely revealed by X-ray diffraction for a bias power higher than 5 W. From bibliographical data and calculated phase diagrams, it can be inferred that these phases would require very low oxygen partial pressure, high temperature and mechanical pressure, to be obtained simultaneously by a conventional ceramic process. This underlines the strong potential of radio-frequency sputtering of oxide targets to prepare original oxides or composite materials. (C) 2007 Elsevier B.V. All rights reserved.