We studied the preparation of the carbon layers on polytetrafluoroethylene (PTFE) by chemical vapor deposition from acetylene induced by UV-excimer lamp. Their surface properties and chemical structure were characterized by Atomic Force Microscopy, Scanning Electron Microscopy, Raman spectroscopy, Rutherford Backscattering Spectrometry, Elastic Recoil Detection Analysis, X-ray Induced Photoelectron Spectroscopy and others. The deposited layers could be characterized as hydrogenated amorphous carbon (a-C:H) containing additional oxygenic structures and conjugated double bonds. The cytocompatibility of the samples was tested with using of human umbilical endothelial cells (HUVEC). In comparison with pristine PTFE, the deposition resulted in drastically increased adhesion and proliferation of HUVEC. (C) 2007 Elsevier B.V. All rights reserved.