화학공학소재연구정보센터
Chemical Physics Letters, Vol.325, No.5-6, 499-502, 2000
Preparation of hydrogenated diamond-like carbon films on conductive glass from an organic liquid using pulsed power
Hydrogenated diamond-like carbon (DLC) films were deposited on conductive glass from acetonitrile by liquid deposition using a pulse-modulated source at room temperature. The structure of the films was characterized by XPS, Raman and IR spectroscopy, The deposits were hydrogenated amorphous DLC films. The films have high transmission ratio (> 70%) in the range of 330 similar to 2000 nm with VIS/UV spectroscopy. The resistivity of the films was of the order of 10(10) Omega . cm.