Gas-phase thermal decomposition of germane, GcH(4), has been studied using a flash pyrolysis technique (similar to20 mus reaction time), coupled with a vacuum-ultraviolet (VUV) photoionization time-of-flight mass spectrometer (TOFMS). Pyrolysis temperatures ranged from 685 to 1500 K, and resulted in the formation of GeH2 above 900 K and GeHx (x = 0, 1, 3) above 1100 K. In addition, Ge-n (n = 2-7) and a small amount of highly unsaturated hydrogenated GenHx (n = 2-7) clusters were observed above 1100 K. (C) 2002 Elsevier Science B.V. All rights reserved.