Chemistry Letters, Vol.29, No.6, 608-609, 2000
Preparation of a new photodegradable copolymer LB film and its application to photopatterning
A new type of copolymer LB film containing a photodegradable monomer, tert-butyl 4-vinylphenyl carbonate (tBVPC), was prepared. It was found that the p(DDA/tBVPC) LB film could be efficiently decomposed by deep UV irradiation. After development with an alkali solution a positive-tone pattern could be drawn with a high resolution of 0.75 mu m.