Si Auger parameter of silica films obtained under different hydrolysis conditions was calculated in order to determine SiOH concentration. It was found that the Auger parameter increased with increasing silicate molecular. Silica films with a large Auger parameter were observed by transmission electron microscope (TEM) to consists of a large diameter particle than films with a small Auger parameter. Increased silica particle diameter demonstrates that the condensation reaction proceeds to an extent that the concentration of OH groups has decreased. It has been concluded that silica film surfaces with a large Auger parameter had few OH groups per Si atom.