A more reactive palladium catalyst than homogeneous Pd(PPh3)(4) catalyst for the Heck reaction supported on a sulfur-terminated GaAs(001) plate was developed. Sulfur termination using (NH4)(2)S-x at 60 degreesC and Pd absorption in acetonitrile at 100 degreesC is essential for the preparation of an active and stable catalyst. The catalyst could be reused in this reaction up to ten times.