Application of atmospheric pressure plasma as an alternative technology for the destruction of toluene is demonstrated in this study. Used TiO2 colloidal solution was obtained by an improved sol-gel method, and coated on glass beads to prepare decomposition of toluene. The physical property of synthesized TiO2 catalyst film was analyzed by XRD and SEM spectroscopy. From these results, it was identified that the catalyst film exhibited anatase structure with particle size of about 50-100 nm after calcination at 500degreesC for 1 h. The decomposition of toluene in TiO2/O-2 plasma system was investigated. Amounts of the catalyst and toluene concentration were fixed as 3 wt.% and 1000 ppm, respectively. The analyses for performance of toluene decomposition and intermediates in reaction were done by the in situ method using the mass spectroscopy and gas chromatography. The toluene of 40% was decomposed at pulse voltage of 13 kV in the only 0, plasma condition without TiO2 catalyst. Furthermore, the conversion enhanced remarkably in the TiO2/O-2 plasma system, and it reached 70% at pulse voltage of 13 W after 120 min. This result was very notable compared with that in photocatalytic system, with below 40% after 120 min reaction. (C) 2002 Elsevier Science B.V. All rights reserved.