The isothermal oxidation of the 200 face of HfC and TiC single crystals was performed at temperatures of 700 degrees-1500 degrees C and at oxygen pressures of 0.08-80 kPa for 4 h, The weight gain by oxidation of the two crystals was followed using an electro-microbalance. A polished cross section of the oxidized crystals was observed using backscattered electron imaging in a scanning electron microscope. Quantitative chemical analysis for Hf, Ti, O, and C was performed by wavelength-dispersive X-ray microanalysis. The early-stage oxidation kinetics of HfC crystals were described by the contracting volume equation, followed by slowed reaction in the latter stage, whereas the same equation was applied to the oxidation of TIC over the entire oxidation time. The preferred (200) orientation of monoclinic HfO2 occurred on the oxidized surface of the HfC crystal. The oxide scale on the HfC crystal consisted of a compact and pore-free black inner scale (zone 1) and a white/gray outer scale that contained many pores (zone 2). Zone 1 contained similar to 25 at. % unoxidized carbon, and zone 2 contained 6-11 at,% carbon. The oxide scale of TiC was composed of an inner dense lamella subscale (zone 1) with a carbon content of 7-23 at,% and an outer region with laminations that was separated by pores and cracks (zone 2), The Ti,O, phase, which exhibits a strong 020 line, was formed at depths of greater than or equal to 40 mu m in the scale obtained at 1500 degrees C. Treatment with a concentrated HF solution allowed zone 1 to be separated from the HfC crystal in the form of carbon-containing films, which were characterized using Raman spectroscopy and transmission electron microscopy.