We report the deposition of aluminum oxide and aluminosilicate thin films onto carbon fiber substrates, at temperatures of 200 degrees and 250 degrees C, respectively. For aluminosilicate films, the Al/Si ratio of the resultant film varied concomitantly with the composition of the liquid precursor mixture. The growth rate for the oxide films was 15-17 angstrom/min, comparable with other methods carried out at higher temperatures. Cross-section SEM images indicate that the deposited films are conformal, following the complex topography of the carbon fiber substrate. Preliminary gas-phase IR analysis suggests that the coatings decompose the nerve agent simulant dimethyl methylphosphonate at temperatures as low as 35 degrees C, suggesting the utility of the reported methodology for the design/fabrication of actively protective fabrics and clothing.