Highly conductive Gallium-doped zinc oxide (Zn1-xGaxO) powder was prepared by calcining precursor that was synthesized from ZnSO4.7H(2)O, GaCl3, and NH4HCO3 by the co-precipitation method. The effects of temperature, heating time, and atmosphere on the calcination process were studied, and we found that these factors are important to control the electrical conductivity, particle size, and agglomeration of Zn1-xGaxO powder. By studying these processing conditions, we found that the optimum one is calcining the precursor in H-2 at 540 degrees C for about 1.5 h, and the product has a specific surface area higher than 28 m(2)/g and volume resistivity lower than 16.8 Omega.cm. The chemistry details of the doping process were also discussed based on the experimental results.