The purpose of this paper was to study by means of cross-sectional transmission electron microscopy (TEM) the uniformity of ceramic superlattices applied in silicon micro-electro-mechanical systems. Results of TEM investigation of TiN/NbN, TiN/CrN and CrN/NbN superlattices deposited on the (100)-oriented silicon substrate have been reported. The superlattice coatings consist of layers of equal thickness. The interfaces between these layers are smooth. No interface roughness is observed both between layers located at the bottom and at the top of the superlattice. The highest mean value of nanohardness is for TiN/CrN (21 GPa) and the lowest for TiN/NbN (14 GPa). (C) 2003 Elsevier Science B.V. All rights reserved.