In this work we studied the preparation of titania thin films by sol-gel process and analyzed the influence of parameters such as deposition speed (100, 200 and 300 mm min(-1)) and stirring type (magnetic or ultrasound) during the homogenization of the sol used for deposition. Europium III was incorporated into the titania thin films and used as a structural probe. The prepared films present good transparency. Excitation spectrum presents a large band with maximum in 309 nm. This band can be attributed to charge transfer band (CTB). The emission spectra presented the correspondent bands to the transitions of the excited state (5 DO) of the ion for the fundamental (F-7(J=0-4)). The thickness films depend on deposition speed, we observed a large enhanced when the deposition speed increase of the 100-200 min min(-1) (0.1562-0.4552 nm) and less to 200-300 min min(-1) (0.4552-0.5364 nm). The refractive index for samples obtained in the deposition speed 200 and 300 mm min(-1), are respectively 1.9798 and 1.9803. Both are different from the film deposited at 100 mm min(-1) (2.3635). (C) 2004 Elsevier B.V All rights reserved.