The novel triple system of [CoPt/C](n)/Ag films were deposited on the glass substrates using RF magnetron sputtering. The X-ray diffraction results show that the oriented growth of CoPt films was strongly influenced by the thickness of Ag underlayer and C content. In this triple system where Ag underlayer can not only induce phase transition from FCC to FCT of CoPt film, but also induce the (0 0 1)-oriented growth and C-doping also plays an important role in the improving (0 0 1) texture and reducing the intergrain interactions. A nearly perfect (0 0 1) texture and a high perpendicular magnetic anisotropy can be obtained in the [CoPt (3 nm)/C (3 nm)](5)/Ag (10 nm) film. (c) 2005 Published by Elsevier B.V.