Journal of Crystal Growth, Vol.208, No.1-4, 795-798, 2000
Two-step method to grow InAs epilayer on GaAs substrate using a new prelayer
The strain relaxed InAs grown on GaAs(0 0 1) under In-rich condition is investigated by X-ray double-crystal diffraction. It is found that the strain is fully relaxed within 10 nm thick InAs layer grown under this condition, which is much faster than the growth of a similar layer of InAs under As-condition. A new growth method to obtain a high-quality InAs layer is suggested.